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Welcome to Vacutec
Vacutec have for 15 years combined its sales/service of vacuum products, with manufacturing and international sales of advanced systems for RIE (Reactive ion Etch), RE (Planar Etch), Triode Etching, PECVD (Plasma Enhanced Deposition), MRTP(Microwave Rapid Processing) and MRTCVD (Microwave Rapid Thermal Chemical Vapour Deposition).
Plasma etching and rapid thermal processing

Vacutec has gained wide international acceptance and credibility for its high quality systems and highly reproducible process results,
Vacutec Systems
  • Thin Film Systems
  • Plasma Etch/Deposition systems
  • Sputtering systems
  • RTP and RT-CVD systems
  • DLC Diamond Like Carbon Deposition systems

 
Applications Support
  • Process Labs in UK and Sweden
  • Well documented processes for
  • Etching and deposition

 
Prices and Installed Base
  • Competitively priced components and systems
  • Customer base of over 500 systems installed

 
Basic Plasma & RTP System
  • Modular design
  • Flexible
  • PC Control with full manual back up
  • ECR retrofit
  • 10 MFC gas safety pod
  • All metal chamber design
  • Single and Dual chamber systems
  • Roots/Rotary/Turbo pumping
PC Computer Control
  • Virtually unlimited recipe storage capacity
  • High resolution colour monitor
  • Graphic parameter display & recipe displays sequential & closed loop control
  • Up to 50 steps per batch recipe
  • Unlimited repeat cycling of steps
  • Data logging
  • IBM PC (or compatible) computer
  • Service mode to monitor/control all inputs/outputs
  • Text files for editing process information
  • On screen note book tied to each recipe
  • Full manual back-up
Last updated: 14th March 2008
Copyright 2008 The Vacutec Group
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