Home About Us News Conferences Contact Technical Support Products.... Integrated glovebox Valved RF crackers Valved Organic Evaporators Nanocluster solutions Mini e-beam evaporators Thermal gas crackers RF atom sources RF ion sources DC ion sources Low energy ion sources Ion milling systems Ionised beam K-cells Mini ion guns Compound dissociation K-cell Gas dosers
	RF Ion Sources - Specifications Model RF25 RF50 RF150 In-vacuum diameter 59mm 98mm 198mm Beam diameter 25mm 50mm 150mm Mounting flange NW63CF NW100CF NW200CF Ion beam energy 100-1000eV 100-1000eV 100-1000eV Beam current density >3mA/cm2 >6mA/cm2 >3mA/cm2 Operating gas flow 5-10sccm 5-10sccm 10-20sccm Standard tuning unit Manual Manual Automatic Power supplies 600W RF and screen grid 600W RF and screen grid 600W RF, screen and accelerator Water cooling 0.5l/s at 20oC 0.5l/s at 20oC 0.5l/s at 20oC Options Filament or plasma bridge neutraliser Optical monitor (OED100) to measure plasma intensity Autotune unit (ATM103) Master control interface Piezoelectric gas doser Isolated shutter Internal mounting Custom length/ special flange mounting
Last updated: 17th July 2008 Copyright 2008 The Vacutec Group Home About Us News Conferences Contact Technical Support