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Medium Energy Ion Scattering
Model DP-MEIS15
The Medium Energy Ion Scattering technique can give unprecedented information on surface composition of thin films. In simple terms, MEIS consists of a pulsed ion beam (typically between 10 and 30keV energy), the sample, and an ion detector. The technique takes advantage of the fact that the impinging ions are backscattered off the top layer of the sample with an energy loss characteristic of the element with which the incident ion collides. This energy loss translates into a loss of scalar momentum which, with a time-sensitive detector, can produce a time-of-flight (TOF) spectrum.
Oxford Applied Research offers a bolt-on, compact MEIS system which can be used for in-house studies, freeing researchers from the time-constraints of National MEIS facilities. The DP-MEIS15 system can produce high-quality data in a matter of seconds, allowing real-time studies of thin film growth.
The instrument can also be used in recoil mode whereby near-surface light elements/species are removed by heavy glancing incident ions (e.g. Ar
+
) and captured by a separate detector
Specification
15 keV beam(max)
<15 ns pulse width
Differential pumping port
<1 in 20 a.m.u mass resolution
Ion species: He
, He
, Ne
+
, Ne
2+
, Ne
3+
...
ExB mass separation of ion species
Data acquisition system
Co-axial backscattering
to 50 s:A typical beam current (species dependent)
Multi-charged species
The ion source produces appreciable currents of multi-charged species such as Ne
2+
and Ne
3+
. Using the ExB mass separator, these species can be used to produce beams with up to 45 keV energy.
Real-time Data
Using the TOF-MEIS system, quality data can be obtained in seconds; samples can be monitored in real-time during film growth. The spectrum on the right, of a superconducting oxide film, was obtained in less than 10 seconds.
Dimensions and Services
Mounting: NW100CF or customer-specific
>System length: 995mm
Gas supply: Standard gas line (in-vacuum high-voltage isolation)
Pumping: Two differential pumping ports
Detector: co-axial microsphere plate (MSP) detector
All power supplies and cables included for:
Ion source, Beam, Focus, X&Y
Beam pulsing
Detector
EXB Mass Separator
Click
here
to download MEIS brochure in pdf format.
Last updated: 12 February 2010
Copyright 2008 The Vacutec Group
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