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Integrated glovebox
Valved RF crackers
Valved Organic Evaporators
Nanocluster solutions
Mini e-beam evaporators
Thermal gas crackers
RF atom sources
RF ion sources
DC ion sources
Low energy ion sources
Ion milling systems
Ionised beam K-cells
Mini ion guns
Compound dissociation K-cell
Gas dosers
DC Ion Sources - Specifications
Model
DC25
DC25s
DC150
In-vacuum length
100mm
100mm
150mm
Beam diameter
25mm
25mm
150mm
Mounting flange
NW63CF*
NW63CF*
NW200CF
Ion beam energy
150-1000eV
10-200eV
150-1000eV
Beam current
40mA (max)**
5mA (max)
300mA (max)
Operating gas flow
3-10sccm
3-10sccm
15-20sccm
Power supplies
600W RF and screen grid
600W RF and screen grid
600W RF, screen and accelerator
Water cooling
0.5l/s at 20
o
C
0.5l/s at 20
o
C
0.5l/s at 20
o
C
*Internal mounting also available **Gas dependent
Options
Filament bridge neutraliser
Piezoelectric gas doser
Isolated shutter
Internal mounting
Custom length/ special flange mounting
Last updated: 17th July 2008
Copyright 2008 The Vacutec Group
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