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Integrated glovebox
Valved RF crackers
Valved Organic Evaporators
Nanocluster solutions
Mini e-beam evaporators
Thermal gas crackers
RF atom sources
RF ion sources
DC ion sources
Low energy ion sources
Ion milling systems
Ionised beam K-cells
Mini ion guns
Compound dissociation K-cell
Gas dosers
DC Ion Sources - Specifications
Model
DC25
DC25s
In-vacuum length
100mm
100mm
Beam diameter
25mm
25mm
Mounting flange
NW63CF
NW63CF
Ion beam energy
150-1000eV
10-200eV
Beam current
20mA (max)**
5mA (max)
Operating gas flow
3-10sccm
3-10sccm
Power supplies
screen and accelerator grids
screen and accelerator grids
Water cooling
0.5l/s at 20
o
C
0.5l/s at 20
o
C
**Gas dependent
Options
Filament bridge neutraliser
Piezoelectric gas doser
Isolated shutter
Custom length/ special flange mounting
Last updated: 23rd July 2010
Copyright 2008 The Vacutec Group
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