ULTRA FINE GRAIN COATER

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ULTRA FINE GRAIN COATER
With the introduction of high resolution Scanning Electron Microscopes, the grain size of the coating became an all important feature. Grain sizes of better than one nanometers are now required for routine examination. The Atomtech Ultra Fine Grain Coater fulfils this function, having the option of one or two ion sources and the capability to rotate up to six different target materials into the beam line. With its planetary motion it can accommodate up to nine standard stubs or three 25 mm diameter samples
The bench top ULTRA FINE GRAlN coater is similar in its size to that of the 800 series bench top thinner. It uses the common base unit, which houses the power supply / automatic timer terminator, vacuum gauge and diaphragm pump. Film thickness is easily reproducible with grain size being better than 1nm for most materials. The coatings have excellent conducting properties which leak away charge to ground which eliminates deflection and image white out in the electron microscope. The neutral atoms from the water cooled sources eliminate Charge,Photon and Thermal damage. Nine specimen stubs can be mounted in the three planet jig assembly. The specimens describe a complex rotating motion and pass close to and opposite the target material. The three holders are a push fit into the planetary drive chucks. Up to three SEM stub holders can be held in each sample holder. As well as the SEM stubs, samples of up to 32 mm diameter can be coated with rotational planetary motion. A combination of samples can be used for the same process run. The specimen stage is driven by an electric motor contained within the housing external to the chamber. Variable speed control allows control of the speed of rotation down to a static position. NO THERMAL DAMAGE TO SENSITIVE SPECIMENS Shielded water cooled ion sources allow no heat from the ion sources to be radiated to the specimens. The plasma is completely confined within the ion source. The target only is exposed to the narrow ion beams. A thermocouple temperature measurement at the specimen indicated no temperature rise after continuous operation of one hour. NO CHARGE DAMAGE TO SENSITIVE SPECIMENS Specimens containing mobile ions such as Na+ or K+ can be coated with minimal charge induced ion migration. The specimens are located in a high vacuum field free space. X-ray microanalysis of mobile ion concentrations in insulating specimens can now be investigated on a more meaningful basis. NO PHOTON DAMAGE TO SENSITIVE SPECIMENS Photons from the intense plasma confined in the Saddle Field Ion Sources cannot reach the specimens. The emitted ion beams are directed away from the specimens onto the target. The specimens are therefore not subjected to any intense photon emission. PRECISION COATING OF IRREGULAR SURFACES The sputter deposition rate is accurately controllable. Film thickness can be repeated or accurately adjusted from one deposition cycle to another, No film thickness monitor is needed, film thickness being controlled solely by time of deposition for any set ion source operating parameters. Planetary motion ensures uniform coverage of irregular surfaces. EXCELLENT SHADOW CASTING TECHNIQUE Each Saddle Field Ion Source produces a beam spot size of about 2 mm on the target, a stationary specimen can therefore be SHADOWED by sputter deposition from a single ion source. CLEAN ENVIRONMENT Deposition occurs in a vacuum system with a base pressure below 10-5 mbar and back filled with high purity argon (99.999%) to about 10-4 mbar. No contaminant effects have been observed.